Positioning and Microvibration Control by Electromagnets h of an Air Spring Vibration Isolation System

Active positioning and microvibration control has been attempted by electromagnets equipped in a bellows-type, air-spring vibration isolation system. Performance tests have been carried out to study the effects. The main components of the system’s isolation table were four electromagnetic actuators and controllers. The vibration isolation table was also equipped with six acceleration sensors for detecting microvibration of the table. The electromagnetic actuators were equipped with bellows-type air springs for passive support of the weight of the item placed ofi the table, with electromagnets for active positioning, as well as for microvibration control, and relative displacement sensors. The controller constituted a relative feedback system for positioning control and an absolute feedback system for vibration isolation control. In the performance test, a 1,490 kg load (net weight of 1,820 kg) was placed on the vibration isolation table, and both the positioning and microvibration control were carried out electromagnetically. Test results revealed that the vibration transmission was reduced by 95%.