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In this paper, we propose a new identification method of the sensor runout and the unbalance on a rigid rotor supported by active magnetic bearings applying the incremental least square on-line method and perform some numerical simulations and experiments on the their identification applying to a rigid rotor model of a turbo-molecular pump. The paper also presents some results of the experiment on the identification accuracy and effects of the rotor model error. From the numerical simulations and the experiments, we conclude that the proposed identification method is effective for the simultaneous identification of the unbalance of rotor and the sensor runout.

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Booktitle: Proceedings of ISMST5