Materials for Efficient High-Flux Magnetic Bearing Actuators

Magnetic bearings have demonstrated the capability for achieving positioning accuracies at the nanometer level in precision motion control stages. This makes possible the positioning of a wafer in six degrees of freedom with the precision necessary for photolithography. To control the position of an object at the nanometer level, a model of the magnetic bearing actuator force-current-airgap relationship must be accurately obtained. Additionally, to reduce thermal effects the design of the actuator should be optimized to achieve maximum power efficiency and flux density. Optimization of the actuator is accomplished by proper pole face sizing and utilizing a magnetic core material which can be magnetized to the highest flux density with low magnetic loss properties. This paper describes the construction of a magnetic bearing calibration fixture designed for experimental measurement of the actuator force characteristics. The results of a material study that review the force properties of nickel-steel, silicon-steel, and cobalt-vanadium-iron, as they apply to magnetic bearing applications are also presented.