Six Degree of Freedom Fine Motion Positioning Stage Based on Magnetic Levitation

The design of a magnetically suspended six degree of freedom positioning system capable of nanometer positioning is presented. The sample holder is controlled in six degrees of freedom (DOF) over 300 micrometers of travel in X, Y and Z directions. A design and control summary, and test results indicating stability and power dissipation are included. The system is vacuum compatible, uses commercially available materials, and requires minimal assembly and setup.