Ultra-Pure Fluid Flowmeter For Harsh Environments

A new ultra pure fluid flowmeter for harsh envi-ronments is presented. The total sensor accuracy is 1% while the repeatability is 0.5% of full scale with a viscosity dependency of 1.5% from 1 to 30mPas. The sensor is based on active magnetic levitation. All wetted surfaces are made of polytetra-fluorethylene (PTFE), or perfluoralkoxy (PFA). Therefore it can be used in the very challenging field of semiconductor manufacturing and in the chemical industry.