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This paper discusses the design and application of a controller that enables an actuator to have 5-degrees of freedom through the application of magnetic levitation. The authors propose a new type of magnetic levitation actuator for electrical-discharge machines (EDMs) and have designed a feed-forward and sensor compensator controller for the system. The practicality of the system was verified through experimentation, in which tracking error of ±1µm was proven. The gap controller designed consists of a conventional drive system and a local actuator module for EDMs. Its efficiency has been confirmed in experiments.

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Booktitle: Proceedings of ISMB9