A Six Magnetic Actuators Integrated Micromotor

A contact free actively controlled micromotor bearing structure of a very flat aspect ratio is presented. The system combines contact free suspension and rotation with six magnetic actuators and a minimum of three inductive sensors. The principle of combined suspension and drive could meet price, reliability and performance requirements for integrated micromotors in the field of optical choppers, gyroscopes, hard disk drives and many more. An experimental setup was manufactured with a combination of micromachining techniques such as etching and electroplating.