Ultra-Precision x-y Stage on AMBs

This paper presents concept and design of a magnetically levitated x-y-z stage combining high precision and large displacement strokes (up to the cm order). The platform, uses inductive sensors for coarse positioning and inteiferometers for the fine sensing, ultimately at sub-nm resolution. It is not yet operational, but preliminary measurement results will be shown at the symposium. Possible applications include usage as a sample stage for scanning probe metrology.