Application of Magnetic Bearing for Contactless Ultra High Precision Positioning

Experimental results are presented of a big and small magnetically beared horizontal positioning table with absolutely no contact. Submicrometer positioning accuracy was achieved at long strokes. The interaction between suspension and propulsion is treated and proves to be negligible during normal operation, which is 1!eTified by measurements. Several sensor types weTe applied Tesulting in different beaTing performance characteristics. Finally the current research program at the Laboratory for Micro Engineering is treated.