Centrifuge for Solution Growth of Semiconductor Layers: An Application of Magnetic Bearings

Three generations of centrifuges equipped with active magnetic bearings (AMEs) have been successfully used for research work in liquid phase epitaxy. The centrifuges have served to prepare semiconductor layers of excellent quality and purity. The strong interest in using AMEs for the preparation of semiconductor material lies in the fact that they can induce the rapid rotation of a large and heavy crucible if it is placed in an extremely clean vacuum or hydrogen environment of a crystal growth apparatus. The AMBs do not need lubrication nor are they subject to wear and particle generation by abrasion.