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A control system of electrostatic actuators using by variable capacitors has been proposed as one method of avoiding the use of high-speed and high-voltage amplifiers. This control system is applied to electrostatic suspension in this paper. An experimental apparatus is fabricated for demonstrating the feasibility of electrostatic suspension. The experimental results show 3-DOF electrostatic suspension is achieved with the proposed control system using variable capacitors.

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Booktitle: Proceedings of ISMB11